Carbon Footprint Reduction in Semiconductor Fabs ( Impact on Nanotechnology)

Abstract: Semiconductor industry is on the path towards one trillion-dollars in revenue by 2030, however, carbon emissions from semiconductor processes are expected to rise at a much steeper rate than the industry scaling. Enabling sustainable growth by lowering greenhouse gas emissions and energy consumption and increasing reliance on renewable energy for operations will be critical to keeping our fabs running. Companies within the semiconductor ecosystem recognize this need and are committed to reducing the carbon footprint of their products. A systems approach is essential to determine the real contributions from the process chambers, sub-fab equipment, and facility level utilities consumption towards the overall emissions from chipmaking, which will guide how best to improve the environmental performance of wafer fab equipment. Based on the lifecycle impact of process gases and the energy consumption patterns of a manufacturing tool, we define the most effective emission reduction strategies. Improved abatement of residual gases and intelligent use of energy & resources based on the tool utilization, can reduce emissions significantly. Applied Materials 3×30 commitment to reduce energy consumption, chemical impact and cleanroom footprint per wafer each by 30% by 2030 will help chip manufacturers meet their sustainability commitments. Agenda: IMPORTANT: · Please log-in 5 minutes before the start of the webinar to ensure that you can access the event. · The audio for this event will be delivered via the web. You will need a computer with sound capabilities to hear the presentation. · Once you enter the event in WebEx, please select “yes” when the pop-up box prompts you to join the Integrated Voice Conference. If you do not see the window asking you to join the voice conference, please check your browser to make sure that pop-ups are not disabled. If you are experiencing difficulties logging in, you may want to try a different internet browser. · You will need to have one of the following players for rich media files in order to view the event: Flash Player 6.0 or later, Windows Media Player 9.0 or later, QuickTime 6.0 or later. Webinar link https://ieee.webex.com/ieee/j.php?MTID=md778dc07a8cfc87a9d2bd742c883b020 Webinar Access Code: 2861 350 7909 / Password: Oct14 Virtual: https://events.vtools.ieee.org/m/440411